点击选择搜索分类
首页 - 娱乐/休闲- 正文
☆☆☆☆☆
||
[美] 布伦德尔,埃文斯,斯特劳瑟 编
出版社: 哈尔滨工业大学出版社 ISBN:9787560342801 版次:1 商品编码:11402700 包装:平装 丛书名: 材料表征原版系列丛书 开本:16开 出版时间:2014-01-01 用纸:胶版纸
Preface to Series x
Preface to the Reissue of Characterization in Silicon Processing xi
Preface xii
Contributors xiv
APPLICATION OF MATERIALS CHARACTERIZATION TECHNIQUES TO SILICON EPITAXIAL GROWTH
1.1 Introduction 1
1.2 Silicon Epitaxial Growth 2
Basic Chemical Reactions 2, Precleaning Considerations 3,
Reactor Types 3
1.3 Film and Process Characterization 4
Crystal Quality 4, PrecleanQuality 6, Thickness 9, Dopant
Concentration and Dopant Profiling 12
1.4 Selective Growth 14
Basic Process Considerations 14, Defect Density and Growth
Morphology 15, Predean Quality 18, Thickness 18
1.5 Si1 _xGex Epitaxial Growth 18
Material Considerations 18, Reactor Types 19
1.6 Si1_ xGex Material Characterization 20
Composition and Thickness 20, Growth Morphology 22, Lattice
Strain and Critical Thickness 23, Relaxation Kinetics 24, Bandgap
Measurements 24, Interracial Abruptness and Outdiffusion 25,
Impurity Profiles 25
1.7 Summary 26
POLYSILICON CONDUCTORS
SILICIDES
ALUMINUM— AND COPPER—BASED CONDUCTORS
TUNGSTEN—BASED CONDUCTORS
BARRIER FILMS
APPENDIX: TECHNIQUE SUMMARIES
硅加工中的表征 电子书 下载 mobi epub pdf txt
硅加工中的表征-so88
硅加工中的表征 pdf epub mobi txt 电子书 下载 2022
图书介绍
☆☆☆☆☆
||
[美] 布伦德尔,埃文斯,斯特劳瑟 编
出版社: 哈尔滨工业大学出版社 ISBN:9787560342801 版次:1 商品编码:11402700 包装:平装 丛书名: 材料表征原版系列丛书 开本:16开 出版时间:2014-01-01 用纸:胶版纸
内容简介
This volume is one of a series originally issued under anotherimprint. The other volumes in this series are as follows:Characterization of Catalytic Materialsisrael E. Wachs;Characterization of Metals and AlloysPaul H. Holloway and P. N Vaidyanathan;Characterization of CeramicsRona/d E. Loehman;Characterization of PolymersNed J. Chou, Stephen R Kowalczyk, Ravi Saraf, and Ho—Ming Tong;Characterization in Compound Semiconductor ProcessingGary McGuire and Yale Strausser;Characterization of Integrated Circuit Packaging MaterialsThomas M. Moore and Robert G. McKenna;Characterization of Composite MaterialsHatsuo Ishida;Characterization of Tribological MaterialsWilliam A. Glaeser;Characterization of Optical MaterialsGregory J. Exarhos;Characterization of Organic Thin FilmsAbraham Ulman.目录
Preface to the Reissue of the Materials Characterization Series ixPreface to Series x
Preface to the Reissue of Characterization in Silicon Processing xi
Preface xii
Contributors xiv
APPLICATION OF MATERIALS CHARACTERIZATION TECHNIQUES TO SILICON EPITAXIAL GROWTH
1.1 Introduction 1
1.2 Silicon Epitaxial Growth 2
Basic Chemical Reactions 2, Precleaning Considerations 3,
Reactor Types 3
1.3 Film and Process Characterization 4
Crystal Quality 4, PrecleanQuality 6, Thickness 9, Dopant
Concentration and Dopant Profiling 12
1.4 Selective Growth 14
Basic Process Considerations 14, Defect Density and Growth
Morphology 15, Predean Quality 18, Thickness 18
1.5 Si1 _xGex Epitaxial Growth 18
Material Considerations 18, Reactor Types 19
1.6 Si1_ xGex Material Characterization 20
Composition and Thickness 20, Growth Morphology 22, Lattice
Strain and Critical Thickness 23, Relaxation Kinetics 24, Bandgap
Measurements 24, Interracial Abruptness and Outdiffusion 25,
Impurity Profiles 25
1.7 Summary 26
POLYSILICON CONDUCTORS
SILICIDES
ALUMINUM— AND COPPER—BASED CONDUCTORS
TUNGSTEN—BASED CONDUCTORS
BARRIER FILMS
APPENDIX: TECHNIQUE SUMMARIES
前言/序言
硅加工中的表征 电子书 下载 mobi epub pdf txt
电子书下载地址:
相关电子书推荐:
- 文件名
- BF-昆虫记-世界文学名著典藏-全译插图本-(法)法布尔 长江文艺出版社 97875354
- 核桃标准化生产
- 高斯和太阳系中的行星 9787544077323
- 淡水冷水性鱼类养殖新技术
- 火山妙趣探索
- 核桃生产实用技术
- 地球的历程 9787533176556
- 农作物秸秆养牛手册 养牛书籍 养牛知识大全书籍 肉牛养殖技术教程书籍 科学饲养肉牛
- 奥雅绘画小课堂-1-随书附赠奥雅密语卡
- 保护地西葫芦南瓜种植难题破解100法
- 24字社会主义核心价值观大众读本-(景颇文)
- 完形填空2000题 高中英语 附详解第四版 华东理工大学
- 物种起源
- 正版 蚯蚓高效养殖技术一本通 蚯蚓养殖技术书籍大全养蚯蚓的书籍教程蚯蚓养殖技术大全
- 彩色口袋自然珍藏图鉴 花朵(全彩)